zldmЗаводская лаборатория. Диагностика материаловIndustrial laboratory. Diagnostics of materials1028-68612588-0187ООО «Издательство «ТЕСТ-ЗЛ»10.26896/1028-6861-2023-89-5-36-40zldm-1931Research ArticleИССЛЕДОВАНИЕ СТРУКТУРЫ И СВОЙСТВ. ФИЗИЧЕСКИЕ МЕТОДЫ ИССЛЕДОВАНИЯ И КОНТРОЛЯTESTING OF STRUCTURE AND PARAMETERS. PHYSICAL METHODS OF TESTING AND QUALITY CONTROLОпределение показателей преломления материалов при моделировании многослойных зеркалDetermination of refractive indices of materials in modeling multilayer mirrorsСергиенкоА. А.SergienkoA. A.

Андрей Алексеевич Сергиенко

119049, Москва, Ленинский пр., д. 4

Andrey A. Sergienko

4, Leninsky prosp., Moscow, 119049

ПушкинД. Б.PushkinD. B.

Дмитрий Борисович Пушкин

119049, Москва, Ленинский пр., д. 4

Dmitriy B. Pushkin

4, Leninsky prosp., Moscow, 119049

pushkindmitriy05@gmail.comКонотоповП. А.KonotopovP. A.

Павел Александрович Конотопов

142103, Московская обл., г. Подольск, ул. Железнодорожная, д. 24

Pavel A. Konotopov

24, Zheleznodorozhnaya ul., Podolsk, Moscow obl., 142103

ЧеремныхА. Д.CheremnykhA. D.

Алексей Дмитриевич Черемных

119049, Москва, Ленинский пр., д. 4

Alexey D. Cheremnykh

4, Leninsky prosp., Moscow, 119049

НИТУ «МИСиС»РоссияNational Research Technological University «MISIS»Russian FederationНИИ НПО «ЛУЧ»РоссияJSC Scientific Research Institute NPO «LUCH»Russian Federation2023260520238953640Copyright © Сергиенко А.А., Пушкин Д.Б., Конотопов П.А., Черемных А.Д., 20232023Сергиенко А.А., Пушкин Д.Б., Конотопов П.А., Черемных А.Д.Sergienko A.A., Pushkin D.B., Konotopov P.A., Cheremnykh A.D.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://www.zldm.ru/jour/article/view/1931

Тонкопленочные покрытия для оптических элементов широко применяют в различных областях промышленности. Так, просветляющие покрытия используют для экранов дисплеев, фотодетекторов, волоконных световодов, зеркальные покрытия — для телескопов, медицинской техники и др. Одна из основных задач при производстве тонкопленочных покрытий — определение показателя преломления и выбор материалов, наносимых на оптические изделия. В работе представлены результаты определения показателей преломления материалов, применяемых для изготовления многослойных зеркал с требуемыми спектральными характеристиками. В общем случае отражение света происходит на границе раздела двух материалов, например, стекла и воздуха. Диэлектрические пленки получали методом высокочастотного ионно-лучевого распыления мишени. Показано, что для достижения минимальных систематических ошибок показатель преломления пленки SiO2 необходимо неоднократно корректировать. Полученные результаты могут быть использованы в производстве высокоточных оптических систем для различных отраслей промышленности, в особенности медицины, космического приборостроения, авиации и др.

Thin-film coatings for optical elements are widely used in various industries. Antireflection coatings are used in display screens, photodetectors, fiber optic light guides, mirror coatings are used for telescopes, medical equipment, etc. One of the main goals in the production of thin-film coatings is to determine the refractive index and the choice of materials applied to optical products. We present the results of determining the refractive indices of materials used for the manufacture of multilayer mirrors with the desired spectral characteristics. In general, light reflection occurs at the interface between two materials, for example, glass and air. Dielectric films were obtained by high-frequency ion-beam sputtering of the target. It is shown that the refractive index of the SiO2 film must be repeatedly corrected to minimize systematic errors. The results obtained can be used in the production of high-precision optical systems for various industries, especially medicine, space instrumentation, aviation and others.

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The authors declare that there are no conflicts of interest present.