zldmЗаводская лаборатория. Диагностика материаловIndustrial laboratory. Diagnostics of materials1028-68612588-0187ООО «Издательство «ТЕСТ-ЗЛ»10.26896/1028-6861-2025-91-3-35-41zldm-2424Research ArticleИССЛЕДОВАНИЕ СТРУКТУРЫ И СВОЙСТВ. ФИЗИЧЕСКИЕ МЕТОДЫ ИССЛЕДОВАНИЯ И КОНТРОЛЯTESTING OF STRUCTURE AND PARAMETERS. PHYSICAL METHODS OF TESTING AND QUALITY CONTROLИсследование металлоксидного газового сенсора повышенной селективности и энергоэффективностиResearch of the metal oxide gas sensor with increased selectivity and energy efficiencyШапошникА. В.ShaposhnikA. V.

Алексей Владимирович Шапошник

394087, Воронеж, ул. Мичурина, д. 1

Alexey V. Shaposhnik

1, ul. Michurina, Voronezh, 394087

МоскалевП. В.MoskalevP. V.

Павел Валентинович Москалев

127055, Москва, Вадковский пер., д. 1

Pavel V. Moskalev

1, Vadkovsky per., Moscow, 127055

moskaleff@mail.ruКульО. В.KulO. V.

Олег Владимирович Куль

125362, Москва, ул. Тушинская, д. 17, оф. 8-08

Oleg V. Kul

of. 8-08, 17, ul. Tushinskaya, Moscow, 125362

ЗвягинА. А.ZvyaginA. A.

Алексей Алексеевич Звягин

394087, Воронеж, ул. Мичурина, д. 1

Alexey A. Zvyagin

1, ul. Michurina, Voronezh, 394087

ВасильевА. А.VasilievA. A.

Алексей Андреевич Васильев

141980, Московская обл., Дубна, ул. Университетская, д. 19

Alexey A. Vasiliev

19, ul. Universitetskaya, Dubna, Moscow obl., 141980

Воронежский государственный аграрный университет им. Императора Петра IРоссияEmperor Peter the Great Voronezh State Agrarian UniversityRussian FederationМосковский государственный технологический университет «СТАНКИН»РоссияMoscow State University of Technology «STANKIN»Russian FederationООО «С-Компонент»РоссияLLC «C-Component»Russian FederationГосударственный университет «Дубна»РоссияState University «Dubna»Russian Federation2025200320259133541Copyright © Шапошник А.В., Москалев П.В., Куль О.В., Звягин А.А., Васильев А.А., 20252025Шапошник А.В., Москалев П.В., Куль О.В., Звягин А.А., Васильев А.А.Shaposhnik A.V., Moskalev P.V., Kul O.V., Zvyagin A.A., Vasiliev A.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://www.zldm.ru/jour/article/view/2424

Развитие газоаналитических приборов на базе полупроводниковых металлоксидных сенсоров связано с ростом их чувствительности, селективности и энергоэффективности. В работе представлены результаты исследования нового металлоксидного газового сенсора. Улучшение характеристик сенсора обеспечивалось за счет миниатюризации диэлектрической подложки и температурной модуляции. Потребляемая мощность изготовленного с использованием разработанной диэлектрической подложки на основе керамики из оксида алюминия (размеры 1,50 × 1,50 × 0,63 мм) сенсора составила около 250 мВт при рабочей температуре 723 К. Для изготовления микронагревателя применяли платиновую резистивную пасту, состоящую из покрытых платиной микронных частиц оксида алюминия и стекла. Резистивную пленку с сопротивлением листа около 4 Ом получали методом трафаретной печати, газочувствительный материал сенсора — золь-гель-методом. Для обработки обучающих подвыборок экспериментальных данных с помощью метода главных компонент выделяли области на плоскости главных компонент, соответствующие условно однокомпонентным газовым системам. Показано, что качественный и количественный анализы условно однокомпонентных газовых систем возможны с помощью единичного металлоксидного сенсора на основе диоксида олова с наночастицами золота в режиме температурной модуляции. Полученные результаты могут быть использованы при разработке новых моделей универсальных и компактных газоаналитических приборов с повышенной энергоэффективностью и селективностью.

The development of gas analytical devices based on semiconductor metal oxide sensors is associated with the growth of their sensitivity, selectivity and energy efficiency. This paper presents the results of a study of a new metal oxide gas sensor. Improvement of the sensor characteristics was achieved through miniaturization of the dielectric substrate and temperature modulation. The electrical power of the sensor manufactured using the developed dielectric substrate based on aluminum oxide ceramics (dimensions 1.50 × 1.50 × 0.63 mm) was about 250 mW at an operating temperature of 723 K. To produce the microheater, we used a platinum resistive paste consisting of platinum-coated micron-sized particles of aluminum oxide and glass. The resistive film with a sheet resistance of about 4 Ω was produced by screen printing, and the gas-sensitive material of the sensor was produced by the sol-gel method. To process the training subsamples of the experimental data using the principal component method, we selected regions on the plane of the principal components corresponding to conventionally single-component gas systems. It was shown that qualitative and quantitative analysis of conventionally single-component gas systems is possible using a single metal oxide sensor based on tin dioxide with gold nanoparticles in the temperature modulation mode. The obtained results can be used in the development of new models of universal and compact gas analytical devices with increased energy efficiency and selectivity.

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The authors declare that there are no conflicts of interest present.