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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">zldm</journal-id><journal-title-group><journal-title xml:lang="ru">Заводская лаборатория. Диагностика материалов</journal-title><trans-title-group xml:lang="en"><trans-title>Industrial laboratory. Diagnostics of materials</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1028-6861</issn><issn pub-type="epub">2588-0187</issn><publisher><publisher-name>ООО «Издательство «ТЕСТ-ЗЛ»</publisher-name></publisher></journal-meta><article-meta><article-id custom-type="elpub" pub-id-type="custom">zldm-354</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>АНАЛИЗ ВЕЩЕСТВА</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>SUBSTANCES ANALYSIS</subject></subj-group></article-categories><title-group><article-title>ОПТИМИЗАЦИЯ УСЛОВИЙ АНАЛИЗА МЕТОДОМ МАСС-СПЕКТРОМЕТРИИ С ИНДУКТИВНО-СВЯЗАННОЙ ПЛАЗМОЙ И ЛАЗЕРНЫМ ПРОБООТБОРОМ</article-title><trans-title-group xml:lang="en"><trans-title>Optimization of Conditions of Laser Sampling and ICP-MS Analysis</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Хвостиков</surname><given-names>В. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Khvostikov</surname><given-names>V. A.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Карандашев</surname><given-names>В. К.</given-names></name><name name-style="western" xml:lang="en"><surname>Karandashev</surname><given-names>V. K.</given-names></name></name-alternatives><email xlink:type="simple">karan@iptm.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Бурмий</surname><given-names>Ж. П.</given-names></name><name name-style="western" xml:lang="en"><surname>Burmii</surname><given-names>Zh. P.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff xml:lang="ru" id="aff-1"><institution>Институт проблем технологии микроэлектроники и особо чистых материалов РАН</institution><country>Russian Federation</country></aff><pub-date pub-type="collection"><year>2017</year></pub-date><pub-date pub-type="epub"><day>10</day><month>01</month><year>2017</year></pub-date><volume>83</volume><issue>1 ч.I</issue><fpage>13</fpage><lpage>20</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Хвостиков В.А., Карандашев В.К., Бурмий Ж.П., 2017</copyright-statement><copyright-year>2017</copyright-year><copyright-holder xml:lang="ru">Хвостиков В.А., Карандашев В.К., Бурмий Ж.П.</copyright-holder><copyright-holder xml:lang="en">Khvostikov V.A., Karandashev V.K., Burmii Z.P.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://www.zldm.ru/jour/article/view/354">https://www.zldm.ru/jour/article/view/354</self-uri><abstract><p>Исследовано влияние параметров лазерного излучения на чувствительность и коэффициенты относительной чувствительности определения элементов при анализе различных материалов методом масс-спектрометрии с индуктивно-связанной плазмой в сочетании с лазерной абляцией. Найдено, что при увеличении плотности мощности лазерного излучения выше 2 • 1010 Вт/см2 для образцов на основе силикатного стекла, базальтового стекла и полиметаллических сульфидов происходит изменение механизма лазерной абляции от теплового к «фазовому взрыву». Показано, что коэффициенты относительной чувствительности определения примесных элементов по отношению к матричным изменяются не более чем на 3 - 5 % при изменении плотности мощности в диапазоне 5 • 109- 1,5 • 1011 Вт/см2. Для большинства примесных элементов коэффициенты относительной чувствительности определения в различных матрицах отличаются не более чем на 10 - 15 %, но для ряда элементов наблюдается значительное, до 1,5-2 раз, различие. Проведено сравнительное исследование двух режимов абляции: при перемещении лазерного луча по поверхности образца и при абляции в «точке». Показано, что чувствительность определения элементов в первом случае в 2 - 3 раза выше, при этом коэффициенты относительной чувствительности определения одинаковы для обоих случаев.</p></abstract><trans-abstract xml:lang="en"><p>The influence of laser radiation parameters on the sensitivity coefficients of relative sensitivity of element determination in analysis of different materials using ICP-MS method combined with laser ablation is studied. The mechanism of laser ablation is shown to change from thermal to “phase explosion” in the samples of silicon glass, basalt glass and polymetal sulfide as the laser power density increases above 2 X 1010 W/cm2. Coefficients of the relative sensitivity of trace elements determination against matrix elements are shown to change by 3 - 5% when the laser power density varies within the range of 5 x 109 - 1.5 x 1011 W/cm2. For most of the trace elements the coefficients of relative sensitivity of their determination in different matrices thus considered differ by 10 - 15 %, however, for some elements the observed difference is rather large being 1.5-2 times and more. A comparative study of two modes of ablation [(i) laser beam scanning along the sample surface and (ii) ablation “in the point”] demonstrated that the sensitivity of element determination is 2 - 3 times higher for the first mode, whereas the coefficients of relative sensitivity of determination being equal for both modes.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>лазерная абляция</kwd><kwd>масс-спектрометрия с индуктивно-связанной плазмой</kwd><kwd>laser ablation</kwd><kwd>inductively coupled plasma mass spectrometry (ICP-MS)</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Gray A. L. 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