For citations:

Cheremnykh A.D., Sergienko A.A., Pushkin D.B. Settings of a monolithic piezoelectric filter on bulk acoustic waves by ion-beam etching. Industrial laboratory. Diagnostics of materials. 2023;89(8):31-37. (In Russ.) https://doi.org/10.26896/1028-6861-2023-89-8-31-37