Universal Sample Preparation Method for Local Phase EBSD-Analysis

EBSD (Electron Backscattered Diffraction) is well-known method for phase analysis of micro-sized objects. EBSD detector is produced as an accessory for a scanning electron microscope. The spatial resolution of EBSD is approximately 30 nm, so this is very attractive method for local phase determination and quantitative texture analysis. Appropriate sample preparation is critical for using of EBSD, but that preparation depends on material of a sample and can be laborious. It was suggested to use an ion column of a FIB/SEM dual platform instrument for EBSD sample preparation. That method is uniform and very straightforward as compared with traditional methods of sample preparation for EBSD. And this is the only way for handling with unique micro-objects because all other methods require doing final polishing of the whole sample surface. The unique micro-object can disappear after such polishing. Also suggested method is the only way if general polishing of a sample is forbidden.

EBSD, sample preparation for EBSD, electron back scattered diffraction, Kikuchi pattern, focused ion beam, scanning electron microscopy, FIB, SEM, EBSD, пробоподготовка для EBSD, дифракция обратно отраженных электронов, картина дифракции, картина Кикучи, ионная колонна, двухлучевой микроскоп, сканирующий электронный микроскоп, СЭМ

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