Plasmochemical Synthesis of Carbon-Containing Films on the Surface of Aluminum Microchips for Polymerase Chain Reaction
Abstract
A method of plasma-enhanced chemical vapour deposition (PECVD) modifying the surface of aluminum microchips for polymerase chain reaction in a real time mode (rt-PCR) is developed. Compounds of different classes - alkanes, alcohols, siloxanes - are used as plasma-forming substances. Properties of the films thus obtained were tested under PCR conditions using the developed model. The electrochemical impedance spectroscopy is used to study the permeability of the samples. The morphological properties are studied by scanning electron microscopy and energy dispersive x-ray microanalysis (EDXMA). It is shown that the most inert coatings, biocompatible under PCR conditions are obtained using hexamethyldisiloxane in PECVD as a plasma-forming substance.
Keywords
плазмохимическое осаждение,
полимеразная цепная реакция,
сканирующая электронная микроскопия,
спектроскопия электрохимического импеданса,
рентгеновский энергодисперсионный микроанализ,
plasma-enhanced chemical vapour deposition,
PECVD,
polymerase chain reaction,
PCR,
scanning electron microscopy,
SEM,
energy dispersive X-ray microanalysis,
EDXMA
About the Authors
Yu. S. Ashina
НИИ химии СПбГУ; ГК «Люмэкс»
Russian Federation
Russian Federation
A. O. Suvorova
НИИ химии СПбГУ; ГК «Люмэкс»
Russian Federation
Russian Federation
M. N. Slyadnev
НИИ химии СПбГУ; ГК «Люмэкс»
Russian Federation
Russian Federation
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Review
For citations:
Ashina Yu.S., Suvorova A.O., Slyadnev M.N. Plasmochemical Synthesis of Carbon-Containing Films on the Surface of Aluminum Microchips for Polymerase Chain Reaction. Industrial laboratory. Diagnostics of materials. 2015;81(5):32-39. (In Russ.)
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