X-ray Fluorescence Analysis of the thin Coatings Using the Method of Fundamental Parameters
Abstract
We obtain the basic equations of the method of fundamental parameters for X-ray analysis of thin coatings with allowance for direct excitation and secondary fluorescence. Introduction of the secondary fluorescence becomes especially important when radiation of the atoms of coating (or substrate) can excite the atoms of the substrate (or coating). We have shown the necessity of taking into account the thickness of substrate films containing heavy elements and incorrectness of using full analytical expression of the integrals for secondary fluorescence instead of numerical calculations by the angle. Sources of the reference data for mass absorption coefficients and photoabsorption, probability of electron transitions and fluorescence used in formulas are indicated. An algorithm for determination of the composition of such coatings on x-ray fluorescence spectrometers configured for analysis of bulk (uncoated) samples, and methods of improving the accuracy of the calculation are proposed.
About the Authors
V. M. Nartsev
Белгородский государственный технологический университет им. В. Г. Шухова
Russian Federation
Russian Federation
A. B. Atkarskaya
Белгородский государственный технологический университет им. В. Г. Шухова
Russian Federation
Russian Federation
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Review
For citations:
Nartsev V.M., Atkarskaya A.B. X-ray Fluorescence Analysis of the thin Coatings Using the Method of Fundamental Parameters. Industrial laboratory. Diagnostics of materials. 2016;82(3):29-35. (In Russ.)
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