Research of the metal oxide gas sensor with increased selectivity and energy efficiency

The development of gas analytical devices based on semiconductor metal oxide sensors is associated with the growth of their sensitivity, selectivity and energy efficiency. This paper presents the results of a study of a new metal oxide gas sensor. Improvement of the sensor characteristics was achieved through miniaturization of the dielectric substrate and temperature modulation. The electrical power of the sensor manufactured using the developed dielectric substrate based on aluminum oxide ceramics (dimensions 1.50 × 1.50 × 0.63 mm) was about 250 mW at an operating temperature of 723 K. To produce the microheater, we used a platinum resistive paste consisting of platinum-coated micron-sized particles of aluminum oxide and glass. The resistive film with a sheet resistance of about 4 Ω was produced by screen printing, and the gas-sensitive material of the sensor was produced by the sol-gel method. To process the training subsamples of the experimental data using the principal component method, we selected regions on the plane of the principal components corresponding to conventionally single-component gas systems. It was shown that qualitative and quantitative analysis of conventionally single-component gas systems is possible using a single metal oxide sensor based on tin dioxide with gold nanoparticles in the temperature modulation mode. The obtained results can be used in the development of new models of universal and compact gas analytical devices with increased energy efficiency and selectivity.

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