For citations:

Kuznetsova A.S., Mochalov G.M., Suvorov S.S. Analysis of the composition and utilization of fluorine-containing gas mixtures for excimer lasers. Industrial laboratory. Diagnostics of materials. 2019;85(11):26-30. (In Russ.) https://doi.org/10.26896/1028-6861-2019-85-11-26-30