Physical and mathematical model of optimal geometric dimensions of a strain gauge for a dual-diaphragm pressure sensor based on numerical modeling
https://doi.org/10.26896/1028-6861-2026-92-9-92-98
Abstract
The study is devoted to solving an urgent scientific and applied problem of improving the metrological characteristics of strain gauge pressure sensors, in particular, their sensitivity in the field of low pressure measurement. The relevance of the work is due to the fact that in modern instrumentation there remains a need to miniaturize and improve the accuracy of measuring transducers, while the issue of purposeful optimization of the geometry and location of strain-sensitive elements often remains insufficiently studied. The main goal is to determine the optimal combination of the load cell size and its placement relative to the membrane to increase the output signal level in the field of low pressure measurement. To achieve this goal, detailed three-dimensional modeling using the finite element method was carried out in a specialized engineering software package. The use of a complete spatial model made it possible to analyze with high reliability the distribution of deformations in the complex composite structure of the sensor and to assess the influence of variations in geometry. Based on an extensive numerical experiment, by systematically varying the parameters, general patterns of changes in the mechanical response were identified. The obtained data set served as the basis for constructing a generalized physicomathematical model of the relationship between the geometry of the sensor element and the resulting strain difference. The model developed using regression analysis methods has a separate view for different zones of the element location, which increases its adequacy. The main scientific result is the developed model, which makes it possible to evaluate and rationally select the geometric configuration of the load cell at the design stage. The practical significance of the work lies in the formulation of specific recommendations for choosing the optimal proportions and location of the sensing elements to achieve the maximum output signal level. The results are of value to engineers and researchers involved in the development and optimization of highly sensitive measuring equipment in fields such as aerospace engineering, energy, robotics, and industrial automation.
About the Authors
S. S. GavriushinRussian Federation
Sergey S. Gavriushin
4, Malyi Kharitonyevsky per., Moscow, 101990
P. A. Skvortsov
Russian Federation
Pavel A. Skvortsov
4, Malyi Kharitonyevsky per., Moscow, 101990
N. V. Riabov
Russian Federation
Nikita V. Riabov
38, Bolshaya Semyonovskaya ul., Moscow, 107023
References
1. Dobrovinskaya E. R., Lytvynov L. A., Pishchik V. Sapphire: Material, Manufacturing, Applications. — New York: Springer, 2009. — 481 p.
2. Vaganov V. I. Integral strain transducers. — Moscow: Énergoatomizdat, 1983. — 136 p. [in Russian].
3. Das K., Himadri S. Dutta. Improved sensitivity of MEMS-based piezoresistive pressure sensor using silicon nitride diaphragm / J. Integrated Circuits Syst. 2024. Vol. 19. No. 1. P. 8. DOI: 10.29292/jics.v19i1.755
4. Mohammadia N., Mohammadzadeha A., Taftib F. F. Design and optimization of piezoresistive mems pressure sensors using ABAQUS / Int. J. Eng. Technol. Sci. (IJETS). 2014. No. 2(6). P. 461 – 473.
5. Gabbi R., Rasia L., Valdiero A., Gabbi M. Computational simulation for square diaphragms of a piezoresistive pressure sensor / IEEE Lat. Am. Trans. 2018. Vol. 16. No. 12. P. 2963 – 2969. DOI: 10.1109/tla.2018.8804263
6. Verma P., Punetha D., Pandey S. K. Sensitivity optimization of MEMS based piezoresistive pressure sensor for harsh environment / Silicon. 2020. No. 12. P. 2663 – 2671. DOI: 10.1007/s12633-019-00362-8
7. Kozlov A. I., Stuchebnikov V. M. Experimental determination of the distribution of deformations in a circular elastic membrane of a strain gauge / Instrumentation. 2014. No. 7. P. 41 – 44 [in Russian].
8. Krivulin N. O., Pavlov D. A., Shilyaev P. A., et al. The effect of defects on the mechanical properties of epitaxial silicon layers on sapphire / Vestn. Nizhegorod. Univ. im. N. I. Lobachevskogo. 2012. No. 3(1). P. 30 – 33 [in Russian].
9. Alekseev A. A., Karpov I. M., Timofeev S. P. Optimization of the membrane shape of a strain gauge pressure sensor by the finite element method / Sensors and Systems. 2022. No. 5. P. 14 – 22 [in Russian].
10. Nag M., Singh J., Kumar A. A high sensitive graphene piezoresistive MEMS pressure sensor by integration of rod beams in silicon diaphragm for low pressure measurement application / Microsyst. Technol. 2020. Vol. 26. P. 2971 – 2976. DOI: 10.1007/s00542-020-04890-x
11. Ranjan P. Modeling and analysis of the effect of strain gradient to design diaphragm for pressure sensing application through finite element analysis / Microsyst. Technol. 2024. Vol. 30. P. 981 – 991. DOI: 10.1007/s00542-024-05643-w
12. Sabhapandit E., Jindal S. K., Kanekal D. Mathematical modeling and numerical simulation of a single-turn MEMS piezoresistive pressure sensor for enhancement of performance metrics / J. Circuits Systems Computers. 2023. Vol. 32. No. 16. 2350276. DOI: 10.1142/s0218126623502766
13. Li C., Zhao L., Ocana J. L., et al. Characterization and analysis of a novel structural SOI piezoresistive pressure sensor with high sensitivity and linearity / Microsyst. Technol. 2020. Vol. 26. No. 26(9). P. 2955 – 2960. DOI: 10.1007/s00542-020-04917-3
14. Thawornsathit P., Juntasaro E., Rattanasonti H., Pengpad P. Mechanical diaphragm structure design of a MEMS-based piezoresistive pressure sensor for sensitivityand linearity enhancement / Eng. J. 2022. Vol. 26. Issue 5. P. 43 – 57. DOI: 10.4186/ej.2022.26.5.43
15. Gabbi R., Rasia L. A., Valdiero A. C., Tolfo Gabbi M. T. Computational simulation for square diaphragms of a piezoresistive pressure sensor / IEEE Lat. Am. Trans. 2018. Vol. 16. No. 12. P. 2963 – 2969. DOI: 10.1109/tla.2018.8804263
16. Nisanth A., Suja K. J., Komaragiri R. Performance analysis of a silicon piezoresistive pressure sensor based on diaphragm geometry and piezoresistor dimensions / International Conference on Circuits, Power and Computing Technologies [ICCPCT-2014], Nagercoil, India, 2014. P. 1273 – 1278. DOI: 10.1109/iccpct.2014.7055011
17. Li C., Cordovilla F., Jagdheesh R., Ocana J. L. Design and optimization of a novel structural MEMS piezoresistive pressure sensor / Microsyst. Technol. 2016. Vol. 23. P. 4531. DOI: 10.1007/s00542-016-31876
18. Yildiz F., Kavuncuoglu E. Machine learning-driven predictive modeling of natural frequency and displacement in perforated diaphragms for enhanced structural analysis / J. Comput. Electron. 2025. Vol. 25. No. 27. DOI: 10.1007/s10825-025-02467-3
19. Abouzarkhanifard A., Chimeh H. E., Janaideh M. A., Zhang L. FEM-inclusive transfer learning for bistable piezoelectric MEMS energy harvester design / IEEE Sensors J. 2023. Vol. 23. No. 4. P. 3521 – 3531. DOI: 10.1109/jsen.2023.3235198
20. Sulwinski R., Johnston R. Methodology for validation of finite element analysis utilizing strain gauge measurements / Conference: ASME 2023 Verification, Validation, and Uncertainty Quantification Symposium. DOI: 10.1115/vvuq2023-108749
Review
For citations:
Gavriushin S.S., Skvortsov P.A., Riabov N.V. Physical and mathematical model of optimal geometric dimensions of a strain gauge for a dual-diaphragm pressure sensor based on numerical modeling. Industrial laboratory. Diagnostics of materials. 2026;92(9):92-98. (In Russ.) https://doi.org/10.26896/1028-6861-2026-92-9-92-98
JATS XML






























